This Catalog is a compilation of equipment at the six Israel nano centers available to all users on a fee basis: internal users, researchers at other universities and industry

BAR ILAN UNIVERSITY
Instrument		Description	Equipment Location	BIU Faculty		Academia	Industry	Operator	Faculty in Charge	Contact email	Contact phone
				Operator	Self
HRSEM		JEOL JSM-7000F with Secondary electrons and Back scattering electrons systems. In addition, the microscope includes a Thermo electron EDS system and Raith Lithography system for lithography with electrons beam.	Advanced technology institude.	$35		$70	$145	Issashar Genish	Prof. Aviad Frydman	[e-mail]	03-5318102
HRTEM		JEOL JEM-2100 with Thermo Fischer Scientific NSS-302E EDS sytem and JEOL EM-24011 STEM.	Center for electron microscopy - Life science building.	$50		$95	$190	Dr. Judith Grinblat	Prof Zvi Malik	[e-mail]	03-5318204
TEM		FEI - Tecnai G2 spirit bio TWIN	Center for electron microscopy - Life science building.	$35		$70	$110	Dr. Judith Grinblat	Prof Zvi Malik	[e-mail]	03-5318205
SEM		FEI - Inspect 5	Chemistry building	$25	$15	$50	$80	Dr. Yossi Taljoseph	Prof Zvi Malik	[e-mail]	03-5318206
E-SEM		FEI - Quanta 200 FEG	Center for electron microscopy - Life science building.	$25	$15	$50	$80	Dr. Yaakov Langsam	Prof Zvi Malik	[e-mail]	03-5318207
FIB		FEI - Helios NanoLab Dual Beam.	Resnik building	$50		$95	$250	Eitan Hamami	Prof. Michael Rosenblue	[e-mail]	03-5318296
eBeam-Lithography		Crestec - e-LINE - Untra high resolusion electron beam lithography and nanoengineering work station.	Resnik building	TBD	TBD	TBD	TBD	Liora Biton	Prof. Aviad Frydman	[e-mail]	03-5318102
SQUID		Quantum Design - M-PMS XL7. Sensitivity -10-8 emu, The magnetism is both parallel and perpendicular to the magnetic field.	Resnik building	TBD	TBD	TBD	TBD	Yossi Bason	Prof. Lior Klien	[e-mail]	03-5317861
PPMS (magnetotransport, 9T, 1.8-400K)		LOT-Oriel 9T magnet	Resnik building	TBD	TBD	TBD	TBD	Yossi Bason	Prof. Lior Klien	[e-mail]	03-5317862
AFM (atomic force microscopy)		VEECO -Nanoscope V SPM. Including: Tapping, Contact Mode (dry and liquid), TUNA, SSRM, EFM, Surface potential, EC, STM, Force Microscopy, Nanoindentation.	Chemistry building	$25	$15	$50	$80	Dr. Olga Gershevich	Prof. Doron Aurbach	[e-mail]	03-5317068
HEBREW UNIVERSITY
Instrument		Description	Equipment Location	HUJI Faculty		Academia Operator/Self	Industry Operator/Self	Operator	Faculty in Charge	Contact email	Contact phone
				Operator	Self
HR SEM		FEI Sirion, SE, BSE, EDS, EBSD, CL, EBIC, cold stage (4K). Ultimate resolution in imaging 1 nm at 10 kV and WD 2 mm.	Unit for Nanocharacterization	₪ 100	₪ 160	₪ 240/150	₪ 320/200	Mrs. Evgenia Blayvas, Mr. Avi Ben Hur, Mr. Vitaly Gutkin, Dr. Inna Popov	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6584879
ESEM		FEI Quanta 200, HV, LV, ESEM, EDS, Peltier stage (-20-60 degC). Ultimate resolution in HV mode - 3.5 nm at 30 kV.	Unit for Nanocharacterization	₪ 120	₪ 70	₪ 180/105	₪ 240/140		Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6584879
HR TEM		FEI Tecnai G2 F20, FEI, TEM-STEM, EDS, EELS, GIF, HAADF	Unit for Nanocharacterization	₪ 200	₪ 120	₪ 300/180	₪ 400/240	Dr. Inna Popov, Dr. Vladimir Uvarov	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6586388
SPM		VEECO Nanoscope IV	Unit for Nanocharacterization	₪ 120	₪ 70	₪ 180/105	₪ 240/140	Dr. Anna Radko	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6584808
X-Ray Diffractometer		Powder D8 Advance of Burker AXS, theta-theta 430 mm goniometer, XRR	Unit for Nanocharacterization	₪ 120	₪ 70	₪ 180/105	₪ 240/140	Dr. Vladimir Uvarov, Dr. Inna Popov	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6586761
XPS & Auger Spectroscopes within one unit		Kratos Axis Ultra system with XPS and scanning Auger modes, dual Al/Mn and monochromated Al anodes for XPS, LaB6 for Auger excitation.	Unit for Nanocharacterization	₪ 200	₪ 120	₪ 300/180	₪ 400/240	Mr. Vitaly Gutkin	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6584799
Sample Preparation Lab		Buehler high precision mechanical grinders, hot mounting press. GATAN ultrasound cutter, mechanical dimpler, Precision Ion Polishing System (PIPS), Olympus light microscopes, Fischione Plasma Cleaner, Quorum technologies bench-top turbo pumped evaporator and sputter coater; ultrasound bath, fume chamber.	Unit for Nanocharacterization	₪ 80	₪ 50	₪ 120/75	₪ 160/100	Mr. Nadya Zaharov	Amir Saar, Uri Banin, Oded Millo	[e-mail]	02-6586023

Instrument

Description

Equipment Location

HUJI Faculty

Academia Operator/Self

Industry Operator/Self

Operator

Faculty in Charge

Contact email

Contact phone

Operator

Self

High Vacuum Sputtering System

Model MS 75x4-L from FHR is a versatile sputtering system designed for deposition of common metals and insulators (i.e. Al, Au, Cr, ITO, Si, SiO2, Si3N4) on samples and substrates (up to a diameter of 4" =100 mm). The system consists of a load-lock chamber and a deposition chamber to preserve high vacuum conditions during deposition. The system can operate in two modes: (1) serial sputtering where multiple-layers can be deposited one on top of the other; (2) co-sputtering mode where one DC target (metals and semiconductors) and one RF target (insulators) can simultaneously be deposited on the substrate. All deposition sequences are computer controlled thus allowing multi-layer deposition.

Unit for Nanofabrication

₪ 120

₪ 60

TBD

TBD

Mrs. Inna Lyubina

Amir Saar, Uri Banin, Oded Millo

Inna Lyubina, Prof. Amir Saar

02-6586094 02-6585701

E-Beam Lithography System - Raith e-LINE with EBID and manipulators

Raith e-LINE uses electron beam for fabrication of submicron (down to 40 nm) patterns on resists. Electron Beam Induced Deposition attachment allows direct etching and deposition of metals and insulators on wafers. Micro-manipulators are used for direct in-situ electrical measurments.

Unit for Nanofabrication

₪ 200

₪ 50

₪ 300/75

₪ 400/100

Dr. Yigal Lilach, Dr. Shimon Eliav

Amir Saar, Uri Banin, Oded Millo

[e-mail]

02-6585249

Mask Aligner

Suss Microtec MA-6 is the state-of-the-art equipment for research purposes, designed to align and transfer patterns from masks to a photoresist layer spinned onto a wafer. It is equipped with a 1000W light source necessary for nanoimprint processes . The MA-6 can be used with 3 to 7 inch glass or quartz masks and 2 to 6 inch wafers or wafer pieces. It is equipped with an optical backside alignment system which is must for MEMS fabrication.

Unit for Nanofabrication

TBD

TBD

TBD

TBD

Dr. Shimon Eliav

Amir Saar, Uri Banin, Oded Millo

[e-mail]

02-6584062

Thermal/E-Gun Evaporator

The VST evaporator model TFDS-462B is a general purpouse deposition system for metallic layers on wafers, with sizes varing from 4" to pieces. It is equipped with 6 e-gun sources, 2 thermal sources, rotating sample holder, heating and cooling capabilities for the sample from liquid N2 temperature till 90°C and variable source distance till 550mm. The system base pressure is 3x10-8 Torr.

Unit for Nanofabrication

TBD

TBD

TBD

TBD

Dr. Shimon Eliav

Amir Saar, Uri Banin, Oded Millo

[e-mail]

02-6584062

Spin Coaters and hot plates

The VST evaporator model TFDS-462B is a general purpose deposition system for metallic layers on wafers, with sizes from 4" to pieces. It is equipped with 6 e-gun sources, 2 thermal sources, rotating sample holder, heating and cooling capabilities.

Unit for Nanofabrication

TBD

TBD

TBD

TBD

Dr. Shimon Eliav

Amir Saar, Uri Banin, Oded Millo

[e-mail]

02-6584062

Check http://nanoscience.huji.ac.il/unc/info_tariffs.htm and http://nanoscience.huji.ac.il/unf/info_tariffs.htm for latest user fee pricing

VAT to be added. Tariffs do not include consumables (tips, cryo-liquids, special holders, targets, preparatoion materials, etc.)

Independent use of equipment allowed after training and approval exam by UNC staff. Tariffs for regular work hours (9 am to 5 pm)

Technical assistant provided by the scientific/technical staff of UNC only