Академия наук республики узбекистан

Approbation of the research results.
The main results of the dissertation 
study have been reported and discussed at republican and international conferences 
on physical electronics 
UzPEC
-
3, UzPEC
-5
, IPEC
-
5, IPEC
-
6 (Tashkent 1999, 
2002, 2005, 2009, 2013), International Conference on Plasma Surface Engineering, 
(Garmisch
-
Partenkirchen, Germany, 2008);
problems of fundamental and applied 
physics
(2006, 2010, Тошкент); International Workshop “Recent Advances in the 
Physics of Low
-
dimentional Nanoscale Systems” (2011,
Tashkent); 
at 
international conferences “Science on Polymers: contribution to innovation 
develo
pment of economy” (Tashkent, 2011), 
IX 
Conference on actual problems of 
physics, materials science and silicon diagnostics, nanoscale structures and devices 
based on it "Silicon
-
2012" (2012, S.
-
Petersburg); 
X 
Conference on actual problems 
of physics, materials science and silicon diagnostics, nanoscale structures and 
devices based on it "Silicon
-2014
"
(2014, 
Irkutsk
), 
and at the seminar of the 
Institute of Ion-
Plasma and Laser Technologies
(15.04.2016), 
and at the seminar of 
the Scientific Council on Award
of Scientific Degree of Doctor of Sciences 
16.07.2013.FM/T.12.01 at the Physical
-
Technical institute, Institute of Ion
-
Plasma 
and Laser Technologies and Samarqand state University
(09.06.2016.).
Publication of the research results.
The 
dissertation results were 
published in 68 scientific works that fully reflect the dissertation content. Of them, 
13 papers in journals including 11 in 
reviewed 
international ones, 15 patents 
including 12 foreign ones, 36 abstracts in Proceedings of international and 
republican conferences.