I bob. Ionli implantasiya usuli

	I.BOB . Ionli implantasiya usuli.
	1.1.Ionli implantasiya usuli xaqida umumiy ma’lumotlar……… 8
	1.2 1.2.Ionli implantasiya uchun asbob-uskunalar haqida t.thunchalar..................................................................................10
	a)Ionli manba. b)Fokuslash va tezlatish. s)Ionli dastaning separatori(analizatori,tahlilagich) d)Ionlar dastasini skanlash 1.3.Tajriba o’tkazish vaqtida amalga texnologik jarayonlar...............................................................11 II.BOB.QATTIQ JISM YUZALARINI VA YUPQA QATLAMLARNI O’RGANISh USULLARI EKSPERIMENTAL TEKShIRUVNING TEXNIK VA METODIKASI............................................................................13 2.1.Umumiy ma’lumotlar.............................................................................13 2.2.Oje-yelektronlar spektroskopiyasi usuli........................................................................................20 2.3. Oje-yelektron spektromet qurilmasi............................................................................... 23 2.4..Ikkilamchi ionlarning mass-spektroskopiya usuli...................................................................................... 27.