Академия наук республики узбекистан

Practical results of the research
:
 
It has been found a chromatography that when water in the alcohol increases 
more than 0.
02% may occur side reactions during the synthesis of organosilicon 
connections tri- and 
tetraethoxysilane;
Was established using the 
simulation 
program SIMION 6 that when 
approaching ion probe with dimensions 30
x
30
x
35mm to position of the substrate 
98 

---

does n
ot change the state of equipotential surfaces between the flow source and 
substrate
;
It has been found that due e-beam evaporator where crucible was loaded 
with Ti and Al in a ratio of 10: 1 in the upper part of the crucible a layer composed 
of many particles with sizes ranging from 5 microns to 20 microns has been 
formen and X-ray structural analysis revealed that it the composition comprises 
mainly of intermetallic 
TiAl
3
;
It has been found that vaporizing the layer consisting of particles of 
TiAl
3 
by 
electron beam can be increased a share of intermetallics in proportion 2.5 in the 
layer growth by ion-stimulation.
Reliability of the obtained results
is confirmed by the fact that modern 
methods and approaches of material science and physical electronics have been 
used for the studies. 
The experimental conditions have been 
thoroughly analyzed. 
For every stage of work the modern analytical equipment with high accuracy has 
been used. The experimental results have been 
scrupulous
ly processed. The results 
obtained and the conclusions are in good agreement with other authors’ theoretical 
and experimental works devoted to physical
-chemical mechanisms of synthesis 
and film growth.