References k. Graff, Metal Impurities in Silicon-device Fabrication, 2nd ed. Springer, Berlin, 2001


H. Nakashima and K. Hashimoto. Deep impurity levels and diffusion coefficient of manganese in silicon. Journal of Applied Physics 69, 1440 (1991); doi: 10.1063/1.347285



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REFERENCES

H. Nakashima and K. Hashimoto. Deep impurity levels and diffusion coefficient of manganese in silicon. Journal of Applied Physics 69, 1440 (1991); doi: 10.1063/1.347285.

  • U Erlesand and M Ostling. Deep levels in silicon after iron silicide formation. Semicond. Sci. Technol. 10 (1995) 1645-1651.

  • Мaria Khorosheva, Vitaly Kveder, Alexey Tereshchenko, Impact of iron atoms on electronic properties of FZ n-Si with dislocationsPhysica B: Condensed Matter10.1016/j.physb.2019.06.007, (2019).

  • N. Fujita, R. Jones, S. Öberg, P.R. Briddon, A.T. Blumenau, A theoretical study of copper contaminated dislocations in silicon, Solid State Phenom. 131–133 (2008) 259–264 https://doi.org/10.4028/www.scientific.net/SSP.131-133.259.

  • V. Kveder, М. Khorosheva, M. Seibt, Interplay of Ni and Au atoms with dislocations and vacancy defects generated by moving dislocations in Si, Solid State Phenom. 242 (2016) 147–154 https://doi.org/10.4028/www.scientific.net/SSP.242.147.


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