134
СПИСОК ЛИТЕРАТУРЫ
1.
Boit, Glowacki, Brahma, Wirth. Thermal Laser Stimulation of Active
Devices in Silicon – A Quantitative FET Parameter Investigation // Proc. IEEE-
IRPS, Phoenix AZ, USA. – 2004. – P. 357 – 360.
2 .
Arkadiusz Glowacki, Sanjib Kumar Brahma, Hiroyoshi Suzuki, Christian
Boit. Systematic Characterization of Integrated Circuit Standard Components as
Stimulated by Scanning Laser Beam // Device and Materials Reliability, IEEE
Transactions on. – 2007. – Vol.7, N.1. – P.31 - 49.
3.
F.
Beaudoin. et al. Dynamic Laser Stimualation Caase Studies // Microeletronics
Reliability. – 2005. – V.45. – P. 1538 – 1543.
4.
F. Beaudoin, R. Desplats, P. Perdu, D. Patrie, G. Haller, P.Poirier, P. Jacob, D.
Lewis. Emission Microscopy and Thermal Laser
Stimulation for Backside
Failure Localization // Proc. IEEE ISTFA 01. – 2001. – P. 227.
5.
Medvid A, Dmitruk I, Onufrijevs P, Pundyk I. Properties of nanostructure
formed on SiO
2
/Si interface by laser radiation // Solid State Phenom. 2008. – V.8 –
P. 559–562.
6.
Artur Medvid el. al. Formation mechanisms of nano and microcones by laser
radiation on surfaces of Si, Ge, and SiGe crystals // Nanoscale Res Lett. 2013. – V.
8(1). – P.264.
7.
Baltes Henry, Brand Oliver, et al. CMOS-MEMS: Advanced Micro and
Nanosystems, Volume 2. Weinheim: Wiley-VCH; 2005, 608p.
8.
B. W. Baird, R. F. Hainsey, X. Peng, P. Y. Pirogovsky. Advances in laser
processing of microelectronics // Proc. of SPIE. – 2007. – Vol. 6451. – P. 64511K-
1-11.
9.
A. Borowiec and H. K. Haugen. Subwavelength ripple formation on the surfaces
of compound semiconductors irradiated with femtosecond laser pulses // Appl.
Phys. Lett. – 2003. – V. 82. – P. 4462–4464.
10.
B. K. Nayak and M. C. Gupta. Ultrafast laser-induced selforganized conical
micro/nano surface structures and their origin // Opt. Lasers Eng. – 2010. – V. 48.
– P. 966–973.
11.
V.Sava, T. L. Mitran, G. Socol , S. Antohe. Silicon surface structuring by XeCl
excimer laser irradiation in atmospheric conditions // Digest Journal of
Nanomaterials and Biostructures. – 2013. – V.8, N.1. – P. 61 – 68.
12.
B. K. Nayak, M. C. Gupta, and K.W. Kolasinski.
Formation of nano-textured
conical microstructures in titanium metal surface by femtosecond laser irradiation
// Appl. Phys. A. – 2008. – V. 90. – P. 399–402.
135
13.
Головань Л.А., Джунь И.О., Докукина А.Е., Заботнов С.В., Ежов А.А.,
Кашкаров П.К., Маслова Н.Е., Остапенко И.О., Панов В.И., Тимошенко В.Ю.
АСМ-исследования наночастиц, формирующихся при модифицировании
поверхности кремния фемтосекундными лазерными импульсами // Известия
Российской академии наук. Серия физическая. – 2009. – Т. 73, №.1. – С. 43-
45.
14.
M. Bolle and S. Lazare. Characterization of submicrometer periodic structures
produced on polymer surfaces with low fluence ultraviolet laser radiation // J.
Appl. Phys. – 1993. – V. 73. – P. 3516–3524.
15.
Вейко В.П. Опорный конспект лекций «Лазерные микро– и
нанотехнологии в микроэлектронике». – СПб: НИУ ИТМО, 2011. – 141 с.
16.
Р.П. Сейсян. Нанолитография в микроэлектронике (Обзор) //
Журнал
технической физики. – 2011. – Т.81, вып. 8. – С. 1-14.
17.
Mizusava N., Uda K., Watanabe Y., Pieczulewski С. Global activities
making X-ray lithography a reality for 100 nm production and beyond // Future
Fab London: Technology Publishing Ltd., 1997,p. 177-185.
18 .
J. Chen, J. Shi, A. Cattoni, D. Decanini, Z. Liu, Y. Chen, and A. M. Haghiri-
Gosnet. A versatile pattern inversion process based on thermal and soft UV
nanoimprint lithography techniques // Microelectron. Eng. – 200. – V. 87. – P.
899-903.
19.
X. Li, Q. Wang, J. Zhang, W. Zhou, Y. Liu, Y. Wan, and X. Niu. Large area
nanosize array stamp UV-based nanoimprint lithography fabricated by size
reduction process // Microelectron. Eng. – 2009. – V. 86. – P. 2015-2019.
20.
Р.П. Сейсян. Нанолитография в микроэлектронике (Обзор) // Журнал
технической физики. – 2011. – Т.81, вып. 8. – С. 1-14.
21.
Р.П. Сейсян. Нанолитография в микроэлектронике (Обзор) // Журнал
технической физики. – 2011. – Т.81, вып. 8. – С. 1-14.
22.
Gwyn C.W., Stulen R., Sweeney D., Altwood D. Extreme ultraviolet lithography
// J. Vac. Sci. Technol. B. – 1998. – V. 16. - P. 3142-3149.
23.
Harriot L.R. Scattering with angular limitation projection electron beam
lithography for suboptical lithography // J. Vac. Sci. Technol. B. – 1997. – V.
15, № 6. – P. 2130-2135.
24 . A. A. Tseng. Recent developments in micromilling using focused ion beam
technology // J. Micromech. Microeng. – 2004. – V. 14. – pp. R15–R34.
136
25 .
W. Shim, A. B. Braunschweig, X. Liao, J. Chai, J. K. Lim, G. F. Zheng, and C.
A. Mirkin. Hard-tip, Soft-spring Lithography // Nature. 2011. – V. 469. – pp. 516-
520.
26 .
W. H. Ko. Trends and frontiers of MEMS // Sens Actuators A.2007. – V. 136.
– P. 62–67.
27.
A. V. Kabanov and H. E. Gendelman. Nanomedicine
in the diagnosis and
therapy of neuro degenerative disorders // Prog. Polym. Sci.2008. – V. 32. – P.
1054–1082.
28.
G. Modi, V. Pillay, Y. E. Choonara, V. M. Ndesendo, L. C. du Toit, and D.
Naidoo. Nanotechnological applications for the treatment of neurodegenerative
disorders // Prog. Neurobiol.2009. – V. 88. – P. 272–285.
29.
П.А.Арутюнов, А. Л. Толстихина. Атомно-силовая микроскопия в задачах
проектирования
приборов
микро
и
наноэлектроники
Do'stlaringiz bilan baham: 
