XPS/ ESCA: Surface Science M-probe with attached inert atmosphere box and UPS,LEED and Auger capability & Phi-XPS
SQUID: Quantum Designs Magnetic Properties Measurement System. The Krischvink group has a two-axis Superconducting Technology, Inc. cryogenic moment magnetometer that they use in conjunction with our SQUID. The Heath group has a Quantum Designs system that they use as a liquid helium cryostat.
The following instruments have some similarities with other instruments on the campus as noted below.
Microtome: Leica Reichart Ultracut S Microtome with an EMFCS cryo-attachment. Grant Jensen’s lab also have a microtome to ours.
FTIR: Nicolet 6700 with ATR (for Si), ATR, reflectance and transmission accessories Dr. Rosman has an FTIR, Nicolet Magna, that is older and does not have the surface specific attachments. There is also a Bruker Vertex 80 FTIR in Dr. Heath’s Lab.
STM & AFM: Digital Instruments Nano-Scope III. The Atwater lab has a Park Scientific AFM and the Collier lab has Nano-scope III also. Also both the Atwater group and the Heath group have UHV AFMs
Molecular Beam Epitaxy systems for Group IV (Si, Ge) and Oxides HV Sputtering System (SRO:Er) UHV Hot Wire CVD Cluster Tool Silicon Tetrachloride CVD Reactor Metal Evaporator UV Ozone Cleaning System Plasma Asher Optical Photolithography Facility Molecular Bean Epitaxy Sulfide, Phosphide, Gallium Nitride
Ambient Atomic Force / Electrostatic Force Microscopy(Park Scientific)
UHV Variable Temperature Atomic Force / Electrostatic Force Microscopy (Omicron Instruments) Near Field Scanning Optical Microscopy (Nanonics) Spectroscopic Ellipsometry
Scanning Electron Microscopes (FEI Quanta & FEI Sirion) Ion-Beam/Electron-Beam Systems (FEI Nova-600 & Nova-200) Scanning Transmission Electron Microscope (FEI Tecnai F-20 & F-30) Electron-Beam Lithography (Leica EBPG-=5000) Kavli Nanoscieence Inductively Coupled Plasma Etching Systems (ICP-RIE) (Oxford Institute Bosh/Cryo & Oxford III-V Metal Etcher) Plasma-Enhanced Cemical Vapor Deposition Systems (Oxford Dielectric PECVD-ICP & Oxford PECVD)