§1.2. Elektron rag'batlantirilgan usulning hozirgi holati
tozalash
Jismoniy fanlar bir qator tarmoqlari jadal rivojlanishi bilan, ortib bormoqda
er osti qatlamlarida yuzaga keladigan moddalarni bilish talabi
jarayon orqali, qattiq jismning sirtini zaryadlangan oqim bilan nurlantirganda
zarralar,
Shakl. 1.2. Kino (1) va elektron foton nurlanishining spektrlari
polikristalli (2) mis
= 0
0
[3; p.204].
naqsh va mexanizmlarni batafsil o'rganishni talab qiladi
ikkilamchi emissiya hodisalari, shuningdek, zamonaviy usullarni ishlab chiqish
ularning tadqiqotlari. Ushbu mikroskopik tabiatning asosiy bilimlari
bunday dolzarb masalalarni hal qilish uchun muayyan hodisalar muhim ahamiyatga ega
fizika va plazma kimyo, qattiq fizika kabi fan va texnologiya sanoati
jismoniy elektronika, mikroelektronika, Materialshunoslik va boshqalar.
[10; c.564, 11; c.506, 12; c.370, 13; c.551, 14; c.407, 15; c.239, 16; c.4-15, 17;
c.1-14, 18; c.311]. Bu jihatdan fotonlar emissiyasi fenomeni
20
metallarni elektronlar va ionlar bilan bombardimon qilish
ikkilamchi emissiya hodisalari ular orasida alohida o'rin tutadi.
O'tgan asrning 70-larining boshlanishiga ko'ra
metall sirtini nisbatan past energiya bilan bombardimon qilish
elektronlar va ionlar bilan porlash umuman kuzatilmasligi kerak.
Kuzatilgan radiatsiya hali ham kelib chiqishi taxmin qilingan
sirtning ifloslanishi va ma'lum hodisalar bilan bog'liq bo'lishi kerak
katodo yoki bioluminesans. O'sha paytda mavjud natijalar
kichik miqdordagi tadqiqotlar cheklangan va tarqoq
ob'ektlar va usullar, va eng muhimi - eksperiment texnikasi bo'yicha
vakuumning etarli tozaligini ta'minlamadi va spektrni chekladi
kuzatilgan radiatsiya oralig'i. Taxminan yetmishning o'rtasidan keyin
o'tgan asrning yillari, ko'plab tadqiqotlar tufayli,
foydalanish bilan Ultra yuqori darajali sharoitlarda amalga oshiriladi
keng ko'lamli uzunliklar uchun zamonaviy spektral monoxromator
to'lqinlar va nozik radiatsiya detektorlari, kuchli olingan
nurlanishda fotonlarni chiqarish fenomenining dalillari
elektronlar va ionlar bilan metall yangi emissiya hodisasidir
ularning asoslari juda zamonaviy diagnostika ishlab chiqilishi mumkin
usullari. Ushbu hodisalarga elektron foton va
ionofotonli emissiya va ularning asosida ishlab chiqilgan usul –
elektron-foton va ion-foton spektroskopiyasi, navbati bilan [19; p. 55-60].
Ushbu usullarning muvaffaqiyatli rivojlanishi jismoniy tabiatni bilish bilan bog'liq
ularning asosiy hodisalari va qonunlari.
Qattiq jismning sirtini elektronlar bilan nurlantirganda kuzatiladi
zaryadlangan va neytral zarralarni ajratish. Chiqarish zaryadlangan
zarrachalar qattiq elektronlarni isitish natijasida yuzaga kelishi mumkin
keyin bu hodisa deyiladi-neytral zarralar uchun termodesorbsiya
yoki zaryadlangan zarralar uchun sirt ionizatsiyasi (PVI). Tozalash
kinetik uzatish paytida yuzadan zaryadlangan zarralar sodir
21
electron energies to the surface atoms of a solid under elastic pressure.the efficiency of the process depends directly on the mass ratiothe ratio of particle mass to electron mass decreases with increasing binding energyparticles with a solid body surface. However, what is the emission of particlesfrom the surface of a solid body to occur as a result of a direct change inpotential energy of electronic excitation of the adsorption bond inkinetic energy of the desorbed particles and this desorption processit is called electron-stimulated desorption (EDD) [20; p. 200, 21; p.
310-313., 22; c.
062002]
Binding states between adsorbates and solid surfaceselectronically excited by irradiating the surface with photons orelectrons, and then as a result of the relaxation process adsorbatesthey are released in the form of ions or neutral particles with kinetic energy.energy of several EVs. This particle release is commonly referred to aselectron transition induced desorption (ETD). Whenelectrons are used as a source of excitation, this is also calledelectron-stimulated desorption (EDD). EDM is one of thebasic methods of surface analysis. See Figure 1.
3 shows the main onethe principle of ion desorption. The mechanism is well explained by the MGR model,proposed by Menzel and Homer, Redhead in 1964 [23; p. 3311-3328, 24;
c.886-905]. Binding state of the adsorbate excited from the binding medium
orbitals to the loosening orbital are a Frank-Condon transition, andsubsequently, the adsorbate is desorbed as an ion. Antonevizz suggestedan extended MGR model, in which an ion formed by an electronby excitation, it moves to the surface and is neutralized. Atomit is desorbed by a repulsive potential bent as neutral or inin some cases, as an ion [25; p. 3811-3815]. In addition, the following suggestions were made:various theories, such as the Knotek-Feibelman model [26; p. 964-967].In recent years, studies of the emission of excited particles have been actively conducted.particles from the surface of solids.
The most studied phenomenon of this is
22
ion-photon emission can be considered a circle [27; p. 836-844, 20; p. 200,].
The main regularities are also established here at the qualitative level
the mechanisms of the phenomenon are understood. EDM has been studied to a lesser extent
excited atoms and, especially, molecules [27; p. 836-844, 28; p. 381, 29;
c.389.].
Currently, the following patterns of EDM have already been established
excited molecules:
- gidroksidi-Haloid kristallarini bombardimon qilishda esd kuzatiladi
u molekulalari*(A
2
+
→
2
P
i
; 306 nm) vodorod kameraga kirganda
uchrashuv [30; C.112, 31; C.525, 32; C.812];
Shakl. 1.3. Etid mexanizmi salohiyati sxemasi [23; C. 3311-3328]
23
- CO molekulalari bilan qoplangan metall sirtini bombardimon qilganda,
metastabil-hayajonlangan holatda CO * molekulalarining esd mavjud
a
3
P. bunday molekulalar tashqariga chiqarilgan oqim bilan qayd etilishi mumkin
elektronlar kollektori, agar molekulalarning qo'zg'alish energiyasi ko'proq ish bo'lsa
kollektorning chiqishi [33; C. 5125];
- oksidlangan yoki sof metall yuzalarni bombardimon qilishda,
Na va K, Cs atomlari bilan qoplangan, molekulalarning ESDSI kuzatiladi
U * (vodorod kiritilganda) [34; p. 1949-1954, 35; C. 242];
- radiatsiya chiqishi, energiya va mekansal taqsimot
qiziqarli molekulalar tegishli ionlarning xususiyatlariga o'xshash va
neytral molekulalarning chiqishi va taqsimlanishidan keskin farq qiladi
asosiy davlat [36; C.367, 37; C.142, 38; C.130]. Shuni ta'kidlash kerakki
ushbu qonunlarning aksariyati hali ham javobgar emas
hatto yuqori sifatli tushuntirish.
Ish [39; C. 175304] o'lchanadi va miqdoriy elektron baholanadi-
molekulyar muzdan (n qatlamlari
2
, CO,
CO
2
. Ar va H
2
O/D
2
O, kriyojenik haroratlarda jamlangan) yilda
elektron energiya diapazoni 150-2000 ev. Ushbu tormoz rejimida
qobiliyat esd chiqishlarining qaramligini tushuntirish uchun etarli emas
elektronlar energiyasi. Mualliflar bilan bog'liq chuqurlik tushunchasini kiritdi
ikki rejim orasidagi o'tishni xarakterlovchi desorbsiya
yuzasiga yaqin saqlash energiya. Ishda bu tushuncha
SUBKEV rejimida esd qanday ko'rsatgan turli tizimlari uchun qo'llaniladigan
misol uchun, Kristal va zarrachalarning tarqalishidagi farqlarni aniqlash mumkin
gözenekli amorf muz CO
2
. Ish [40; C.945-952] mualliflar o'lchanadi
oksidlangan volfram yuzasida adsorbsiyalangan atomlarning chiqishi
Evropa va Samariya esd usuli yordamida bir nechta noyob tuproq
metall (RZM), bombardimon elektronlar energiyasiga qarab,
ishqoriy atomlar, volfram oksidlanish darajasi va sirt qoplamalar
harorat
substratlar.
Tajribalar
amalga oshirildi
bilan
yordam
24
vaqti-vaqti bilan usul va usul asosida ishlaydigan qabul qiluvchi
140 substrat harorat oralig'ida sirt ionlanish (PVI)
600 K. ga qadar, bombardimon elektronlarning qaramligini hosil qilish aniqlandi
energiyadan rezonans xarakterga ega edi. Bundan tashqari, qaramlik aniqlandi
EU va Sm qatlamlaridan esd chiqishi yuzaga adsorbsiyalangan
oksidlangan volfram, elektronlar energiyasidan rezonanslashadi,
va Evropa Ittifoqi atomlarining chiqishi cho'qqilari, Sm, skelet darajasini qo'zg'atish bilan bog'liq
RZM va euo va SmO molekulalarining tepalari-W ning skelet darajasini qo'zg'atish bilan.
RZM atomlarining chiqishi, masalan, harorat va
konsentratsion ularning eksitonlari darajasining holati bilan izohlanadi
oksidlangan V ning o'tkazuvchanlik zonasining pastki qismiga va chiqishning bog'liqligiga nisbatan
RZM molekulyar oksidlari o'zgarishlar o'tish natijasidir
RZM atomlarining adsorbsion qatlami. Ish [41; C.1512-1515] tekshirildi
Luminesans yordamida atom o'tish sohasidagi zarrachalar esd
Qattiq sirtdan desorbirovali vuf spektroskopiyasi
azot. Elektron nur energiyasining o'zgarishi aniqlandi
namunaning hajmi va er osti qismining depozitlarini aniqlang. Mualliflar
bu ish birinchi marta hayajonlangan atomlarning esd dalillarini oldi
azot va uning mexanizmlarini taklif qildi.
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