Тадқиқотнинг илмий янгилиги
Scientific novelty of the research
ion implantatsiya usulida Germaniyning yuzasida va yuzi osti qatlamlarida nanokristallar olish bo’yicha va bu nanokristallar yangi turdagi tranzistorlarda, integralsxemalarda va quyosh elementlarini olishda ishlatiladi
in terms of obtaining nanocrystals on the surface and underground layers of Germany by ion implantation method, and these nanocrystals are used in new types of transistors, integrated circuits and obtaining solar elements
Si юпқа оксидли пленкалари ва Si нинг чанглатиш коэффициентларига киритилган атомларнинг таъсири ўрганилган
The influence of thin oxide films of Si and atoms included in the dusting coefficients of Si has been studied
Ilmiy ishim bo’yicha bitta Scopusda maqolam chiqqan, ya’ni International Scientific Conference «Construction Mechanics, Hydraulics and Water Resources Engineering» (CONMECHYDRO 2021) jurnalda Optimum tehnological modes of ion implantation and subsequent annealing for formation of thin nanosized silicide films mavzusida chop etilgan va yana bitta Scopusga tayyorlanayabdi , beshta tezis o’zimizning O’zbekiston Respublikasida o’tkazilgan konferensiyalarda chop etilgan.
My scientific work was published in one Scopus, the International Scientific Conference "Building Mechanics, Hydraulics and Water Resources Engineering " (CONMECHYDRO 2021) on the topic "Optimal technological modes of ion implantation and subsequent annealing for the formation of thin nanoscale silicide films, etc." prepared for Scopus, five abstracts published at conferences in our Republic of Uzbekistan.
Mening ilmiy ishim bitta Scopus jurnalida, "Qurilish mexanikasi, gidravlika va suv resurslari muhandisligi" xalqaro ilmiy konferentsiyasida (CONMECHYDRO 2021) "Yupqa nano o'lchamdagi silitsid plyonkalarini shakllantirish uchun ion implantatsiyasi va keyingi tavlanishning optimal texnologik usullari va boshqalar" mavzusida nashr etilgan. ." Scopus uchun tayyorlangan, O‘zbekiston Respublikasida o‘tkazilgan anjumanlarda chop etilgan beshta tezis.
Яримўтказгичлар физикаси ва микроэлектроника илмий тадқиқот институти II xalqaro ilmiy konferensiya , 19-20 ноябр, Тошкент-2021.
Тошкент шаҳридаги Миллий тадқиқот "MEI" университети akademik Mo'minov R. A. tavalludining 80 yilligiga bag'ishlangan аnjuman 28-29 октябр, Тошкент2021,
Восьмая Международная конференция по Физической Электронике IPEC-8 23-24 сентября 2021 Ташкент, Узбекистан Сборник тезисов докладов
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