30
work function difference of each material using the distance from the top of oxide to the
material block.
Figure 3.3 shows the TEM image of
cross-section view of Al-AlO
x
-Al MIM structure.
The thickness of native oxide layer is about 5.6 nm. The aluminum and nickel is easy to
obtain thin native oxide layer so that these materials were used to form bottom electrode.
Figure 3.3: The TEM image of cross-section view of Al-AlO
x
-Al MIM structure