Fotoenergetikada nanostrukturali yarimo‘tkazgich materiallar II xalqaro ilmiy anjumani

2. Application of the “Intersection” Multi
–
Objective Optimization in Material 
Selection of RF-MEMS Shunt Capacitive Switches 
2.1 Optimal Material Indices 
In the study of Deshmukh et al [1], the optimal objectives for this purpose are 
low pull – in voltage, low RF loss, high thermal conductivity and maximum 
displacement of the beam structure. As a result, the square root of Young’s 
modulus of the material, 
E
0.5
, the electrical resistive c
oe
fficient, 

e
, thermal 
conductivity of the material, 

, the ratio of 

f
 
of the fracture strength to the 
Young’s modulus 
E
of the material, 

f
/
E
, are involved as the optimal material 
indices [1].

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Fotoenergetikada nanostrukturali yarimo‘tkazgich materiallar

II xalqaro ilmiy anjumani 
 
19-20 noyabr 2021 yil 
102 
2.2 Divisions of the Optimal Material Indices
From analyzing the requirements of the optimizations of bridge of RF MEMS 
shunt capacitive switches, i.e., higher pull-in voltage (
V
p
), lower RF loss, higher 
thermal conductivity and the higher maximum displacement of switch beam [1], 
the indices of square root of Young’s modulus of the material, 
E
0.5
,
 

and 

f
/
E
belong to the beneficial type of material performance
 
index
, 
and 

e
belongs to the 
unbeneficial type of material performance
 
index.