Conference Paper

Литература: 
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THE PROCESSES OF FABRICATION MICRO-HOLES IN ALUMINIUM FILMS BY 
PICOSECOND LASER AS SUBSTRATE FOR CATALYST 
Tursunkulov O.M.
1
, Sobirov B.R. 
2 
1
Center for Advanced Technologies, 100174, Tashkent, Almazar district, Talabalar 
shaxarchasi 3a, Uzbekistan; E-mail: [e-mail] 
2
Institute of Ion-Plasma and Laser Technologies, 100125, Durmon yuli st. 33, 
Tashkent 
The application of controlled catalytic processes in wide areas of manufacturing using 
metal catalysts is important as chemical, oil and gas industry, but also in the metallurgical, 
pharmaceutical, food, electronic and other industries. This key factor is stimulates to carry out 
comprehensive researches in this direction. These researches were caused that catalytic 
reactions using metal catalysts are the most important processes for the production technology 
of inorganic and organic materials, as well as the main factor in the production of raw 
materials, which determines a significant degree of production capacity. Especially the 
particular interest is focused to development of a catalytically active mass on substrate matrix 
of metal that has a developed and a porous structure. In this case, the effectiveness of the 
catalyst deposited on a metal substrate in many cases, determined by a substrate layer having 
a significant specific surface and comparatively better adhesion that gives the catalyst higher 
efficiency. Uniform alumina films are an ideal surface for creating highly efficient 
heterogeneous micro sized catalysts. The drilling of aluminum metal samples by UV output 
from a diode-pumped Nd:YAG laser with frequency doubling and tripling , gives a significant 
advantage due to higher average drilling speed and accuracy, and minimal recast layer. The 

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Техник ва технологик фанлар со
ҳ
аларининг инновацион масалалари. ТДТУ ТФ 2020 
182 
aim of this work is to develop a technology for fabrication ordered micro holes array on 
aluminum processed by pulsed laser radiation. In particular, study of the influence of the 
pulse duration and power, from the picosecond regime, on the formation of the holes shape 
and depth during percussion drilling in aluminum is presented. The starting material for the 
manufacture of picosecond laser drilled metal was used aluminum plates 4 x 4cm size and a 
thickness of up to 2 mm. Before exposure to pulsed laser irradiation, the metal surface was 
ground and polished on a TM-1F Power Tool grinder machine. Then a sequential cleaning of 
the metal surface was carried out in ultrasonic bath, first in ethanol and then deionized water, 
respectively, for 10 minutes at room temperature. Next, the sample was dried in a drying 
chamber for 3 hours at a temperature of 50 C. After sample preparation, in order to obtain a 
micro-holes, the surface of aluminum samples was micro-drilled by picosecond lasers. The 
UV laser source was 28 picosecond diode pumped Nd:YAG laser (PL2231-50, Ekspla, 
Litvania) operating at the 4-th harmonic (UV line at λ =266 nm) within the pulse energy range 
1,6 mJ at the repetition rate 50 Hz. The installation of laser shown in figure 1 (a). Achromatic 
quartz lens with the focal length F = 75 mm was used for focusing. Interval between each 
holes were 100 μm, laser treatment time duration per hole was 5 second, i.e. the number of 
pulses per hole was around 250 pulses. Then samples after investigations again fixed and 
mechanical polished on a TM-1F Power Tool grinder machine, until obtaining mirrored 
surface. In addition, sequential cleaning of the metal surface was carried out in ultrasonic 
bath. A series of experiments were performed to examine the morphology, and composition 
of laser-drilled surface of aluminum sample. Surface microstructure of the metallic samples 
was studied by optical microscopy using polarizing microscope Axlo Scope (AXIO) with 
integrated digital camera AXIOCam ERc5S. The morphology of the sample before and after 
anodizing was investigated using a scanning electron microscope SEM EVO MA 10 (Zeiss) 
with energy dispersive X-ray spectroscopy EDS Aztec Energy Advanced X-Act (Oxford 
Instruments) that used for local elemental analysis of samples. The microstructure of the 
surface of the alumnium foil before irradiation with a pulsed laser is shown in Fig. 1 (b).