References k. Graff, Metal Impurities in Silicon-device Fabrication, 2nd ed. Springer, Berlin, 2001


H. Nakashima and K. Hashimoto. Deep impurity levels and diffusion coefficient of manganese in silicon. Journal of Applied Physics 69, 1440 (1991); doi: 10.1063/1.347285



Download 32.63 Kb.
bet8/12
Sana28.08.2021
Hajmi32.63 Kb.
1   ...   4   5   6   7   8   9   10   11   12

H. Nakashima and K. Hashimoto. Deep impurity levels and diffusion coefficient of manganese in silicon. Journal of Applied Physics 69, 1440 (1991); doi: 10.1063/1.347285.

  • U Erlesand and M Ostling. Deep levels in silicon after iron silicide formation. Semicond. Sci. Technol. 10 (1995) 1645-1651.

  • Мaria Khorosheva, Vitaly Kveder, Alexey Tereshchenko, Impact of iron atoms on electronic properties of FZ n-Si with dislocations, Physica B: Condensed Matter10.1016/j.physb.2019.06.007, (2019).

  • N. Fujita, R. Jones, S. Öberg, P.R. Briddon, A.T. Blumenau, A theoretical study of copper contaminated dislocations in silicon, Solid State Phenom. 131–133 (2008) 259–264 https://doi.org/10.4028/www.scientific.net/SSP.131-133.259.

  • V. Kveder, М. Khorosheva, M. Seibt, Interplay of Ni and Au atoms with dislocations and vacancy defects generated by moving dislocations in Si, Solid State Phenom. 242 (2016) 147–154 https://doi.org/10.4028/www.scientific.net/SSP.242.147.


  • Download 32.63 Kb.

    Do'stlaringiz bilan baham:
  • 1   ...   4   5   6   7   8   9   10   11   12




    Ma'lumotlar bazasi mualliflik huquqi bilan himoyalangan ©hozir.org 2020
    ma'muriyatiga murojaat qiling

        Bosh sahifa
    davlat universiteti
    ta’lim vazirligi
    maxsus ta’lim
    O’zbekiston respublikasi
    zbekiston respublikasi
    axborot texnologiyalari
    o’rta maxsus
    nomidagi toshkent
    guruh talabasi
    davlat pedagogika
    texnologiyalari universiteti
    xorazmiy nomidagi
    toshkent axborot
    pedagogika instituti
    rivojlantirish vazirligi
    haqida tushuncha
    toshkent davlat
    Toshkent davlat
    vazirligi toshkent
    tashkil etish
    matematika fakulteti
    ta’limi vazirligi
    kommunikatsiyalarini rivojlantirish
    samarqand davlat
    vazirligi muhammad
    pedagogika universiteti
    bilan ishlash
    fanining predmeti
    Darsning maqsadi
    navoiy nomidagi
    o’rta ta’lim
    Ishdan maqsad
    haqida umumiy
    nomidagi samarqand
    fizika matematika
    sinflar uchun
    fanlar fakulteti
    maxsus ta'lim
    Nizomiy nomidagi
    ta'lim vazirligi
    moliya instituti
    universiteti fizika
    Ўзбекистон республикаси
    umumiy o’rta
    Referat mavzu
    respublikasi axborot
    Toshkent axborot
    таълим вазирлиги
    Alisher navoiy
    махсус таълим
    Buxoro davlat