References k. Graff, Metal Impurities in Silicon-device Fabrication, 2nd ed. Springer, Berlin, 2001


P. Zhang, Diffusion profiles of high dosage Cr and V ions implanted into silicon. Journal of Applied Physics, 2004, 96(2), pp.1053-1058



Download 32.63 Kb.
bet3/12
Sana28.08.2021
Hajmi32.63 Kb.
1   2   3   4   5   6   7   8   9   ...   12

P. Zhang, Diffusion profiles of high dosage Cr and V ions implanted into silicon. Journal of Applied Physics, 2004, 96(2), pp.1053-1058


  • Sh. Tanaka, H. Kitagawa. Diffusion and Electrical Properties of Iron-Related Defects in N-Type Silicon Grown by Czochralski- and Floating Zone Method. Solid State Phenomena Vol 71 (2000) pp 51-72
  • Zh. Zenga, X. Ma. Effect of oxygen precipitates on dislocation motion in Czochralski silicon. Journal of Crystal Growth, 312(2010), pp.169–173


  • W. Wang, D. Yang. Effect of vacancies on copper precipitation in n-type Czochralski silicon. Phys. stat. sol. (a) 205, No. 11, 2008, pp.2662–2665.

  • D. Hwang, S. Hur, K. Lee. The influence of point defect on the behavior of oxygen precipitation in CZ-Si wafers. Journal of Crystal Growth, Volume 249, Issues 1, 2003, pp. 37-43

  • Y.Kamon, H.Harima, A.Yanase, H.Katayama-Yoshida. Ultra-fast diffusion mechanism of the late 3d transition metal impurities in silicon. Physica B: Condensed Matter, 2001, Volumes 308–310, pp.391-395.

  • Download 32.63 Kb.

    Do'stlaringiz bilan baham:
  • 1   2   3   4   5   6   7   8   9   ...   12




    Ma'lumotlar bazasi mualliflik huquqi bilan himoyalangan ©hozir.org 2020
    ma'muriyatiga murojaat qiling

        Bosh sahifa
    davlat universiteti
    ta’lim vazirligi
    maxsus ta’lim
    O’zbekiston respublikasi
    zbekiston respublikasi
    axborot texnologiyalari
    o’rta maxsus
    nomidagi toshkent
    guruh talabasi
    davlat pedagogika
    texnologiyalari universiteti
    xorazmiy nomidagi
    toshkent axborot
    pedagogika instituti
    rivojlantirish vazirligi
    haqida tushuncha
    toshkent davlat
    Toshkent davlat
    vazirligi toshkent
    tashkil etish
    matematika fakulteti
    ta’limi vazirligi
    kommunikatsiyalarini rivojlantirish
    samarqand davlat
    vazirligi muhammad
    pedagogika universiteti
    bilan ishlash
    fanining predmeti
    Darsning maqsadi
    navoiy nomidagi
    o’rta ta’lim
    Ishdan maqsad
    haqida umumiy
    nomidagi samarqand
    fizika matematika
    sinflar uchun
    fanlar fakulteti
    maxsus ta'lim
    Nizomiy nomidagi
    ta'lim vazirligi
    moliya instituti
    universiteti fizika
    Ўзбекистон республикаси
    umumiy o’rta
    Referat mavzu
    respublikasi axborot
    Toshkent axborot
    таълим вазирлиги
    Alisher navoiy
    махсус таълим
    Buxoro davlat